Droplet-target laser-plasma source for proximity x-ray lithography
نویسنده
چکیده
A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated nozzle. Emission from heliumand hydrogenlike fluorine in the 1.2–1.7 nm wavelength range was determined to ;2310 photons/~sr-pulse!, which corresponds to a conversion efficiency of ;5% of the 70 mJ laser pulse. Exposure of a copolymer of PMMA–MAA confirms the measured photon flux. Debris production was approximately 70 pg/sr pulse. The applicability of the source for dedicated lithography systems is discussed. © 1996 American Institute of Physics. @S0003-6951~96!02719-2#
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تاریخ انتشار 1996